教員情報 - 中村　圭二 | 中部大学

（最終更新日 : 2023-08-16 10:37:50）

ナカムラ　ケイジ NAKAMURA Keiji
中村　圭二

所属中部大学工学部電気電子システム工学科

中部大学大学院工学研究科電気電子工学専攻

職名教授

学歴
	名古屋大学大学院工学研究科博士 (工学)

所属学会
～	IEEE
	∟ Nagoya Section Standing Committee Chairs
～	プラズマ・核融合学会
	∟ 広報委
～	応用物理学会
全件表示（8件）

現在の専門分野
プラズマ工学, 計測工学

研究テーマ
プラズマを用いた材料プロセス
環境保全に向けたプラズマ応用
高密度プラズマの生成・計測・制御

担当授業科目
Gaseous Electronics A (at Graduate School); Electronic circuit A, Seminar B, Mathmatics for Electrical Engineering
放電現象特論A （大学院）、電気数学演習B、電子回路A、電気応用工学実験A、ゼミナールB

著書・論文歴
論文	Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance Japanese Journal of Applied Physics (Vol. 50),116101-1-116101-6頁 2011
論文	Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance Japanese Journal of Applied Physics Vol. 50,116101-1 2011
論文	Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas Appl. Phys. Express (Vol. 4),066101-1 2011
論文	Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas Appl. Phys. Express Vol. 4,066101-1 2011
論文	Observation of Optical Fluorescence of GaN Thin Films in an Inductively-Coupled Plasma Containing High Energy Electrons Japanese Journal of Applied Physics (Vol. 50),01AA02-1 2011
全件表示（16件）

学会発表
2013/01	Curling Probe Monitoring of Plasma CVD and Wall Cleaning Processes (5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) Tup-A07OA)
2013/01	Curling Probe Monitoring of Plasma CVD and Wall Cleaning Processes' Tup-A07OA (5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013))
2013/01	Effects of configuration on resonance characteristics of plane-type microwave resonator probe (5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) P1024.)
2013/01	Effects of configuration on resonance characteristics of plane-type microwave resonator probe (5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) P1024.)
2013/01	In-itu photo luminescence observation of GaN thin film exposed in inductively-coupled plasmas (5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) P1030A)
全件表示（20件）