中部大学

中部大学

教員情報

内田 秀雄 UCHIDA Hideo

プロフィール

職名 准教授
所属 工学部 電気電子システム工学科
工学部 電子情報工学科
大学院 工学研究科 電気電子工学専攻
最終学歴 名古屋工業大学大学院
学位 博士(工学)(名古屋工業大学)
所属学会・役職 応用物理学会
電気学会
レーザー学会
電子情報通信学会
専門分野 半導体工学、太陽電池、ナノテクノロジー、集積回路工学
研究テーマ カーボン半導体太陽電池、ナノ構造カーボン、ソーラー飛行船、半導体中の不純物拡散、光電子集積回路、集積回路製造技術
研究紹介PDF
授業科目 電子工学入門、電子情報工学実験、集積回路工学、応用電気回路、創成実験、電磁気学、電気計測、光通信
共同研究キーワード カーボン半導体、カーボン薄膜、ソーラー飛行船

学術論文、評論

Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quarts and flexible plastic substrates by microwave surface wave plasma CVD, Diamond and Related Materials, Vol.14, pp. 1084-1088, 2005

Photovoltaic characteristics of postdeposition iodine-doped amorphous carbon films by microwave surface wave plasma chemical vapor deposition, Applied physics letters, Vol.87, 161912, 2005

Effects of deposition gas pressure on the properties of hydrogenated amorphous carbon nitride films grown by surface wave microwave plasma chemical vapor deposition, Diamond and Related Materials, Vol.14, pp. 975-982, 2005

Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quartz and flexible plastic substrates by microwave surface wave plasma CVD, Diamond and Related Materials, Vol.14, pp.1084-1088, 2005

The optical properties of nitrogenated amorphous carbon grown by a novel surface wave microwave plasma CVD method, Modern Physics Letters B, Vol.18, p.987, 2004

Effects of iodine doping on optoelectronic properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD, Diamond and Related Materials, Vol. 13, pp.2136-2139, 2004

Application of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator, Japanese Journal of Applied Physics, Vol.42, Part 1, No.4A, 2003

Sb Pile-up at Oxide/Si Interface during Drive-in Diffusion after Predeposition Using Doped Oxide Source, Japanese Journal of Applied Physics, Vol.42, Part 1, No.3, 2003

Boron Diffusion Profiles in Ultrathin Silicon-on-Insulator Structures and Their Relation to Crystalline Quality, Japanese Journal of Applied Physics, Vol.41, Part 1, No.7A, 2002

Surface Concentration Dependence of Diffusion Profile Shape for Phosphorus in Si, Solid State Phenomena, Vols.87-79, 2001

講演、シンポジウム、学会発表

Application if Solar-powered Airship to establish wireless Communication during Natural Disaster, 15th International Photovoltaic Science and Engineering Conference (PVSEC-15), 2005

Effects of Microwave Power on Optical and Structural Properties of a-C Thin Films Deposited by Microwave Surface-Wave Plasma CVD, 15th International Photovoltaic Science and Engineering Conference (PVSEC15), 2005

The Properties of Nitrogenated Amorphous Carbon Films Grown by Microwave-Surface-wave Plasma CVD: Effects of Gas Composition Pressure, 15th International Photovoltaic Science and Engineering Conference (PVSEC15), 2005

Optical and structural properties of amorphous carbon thin films deposited by microwave surface-wave plasma CVD, 8th International Conference on Applications of Diamond and Related Mater,ials/1st Nano Carbon Joint Conference (ADC 2005), 2005

Catalytic effects of ferrocene on optical and structural properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD, 10th International Conference on New Diamond Science and Technology (ICNDST-10), 2005

Amorphous carbon thin film deposition by microwave surface-wave plasma CVD for photovoltaic solar cell, 31st Photovoltaic Specialists Conference and Exhibition, 2005

Carbon-based solar cell: A possible solution for energy and environmental problems, World Conference on Energy for Sustainable Development: Technology Advances and Environmental Issues, 2004

Photoconductivity of amorphous carbon nitride films deposited by microwave surface-wave plasma CVD, International Symposium on Nano Carbons 2004 (ISNC 2004), 2004

Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quartz and flexible plastic substrates by microwave surface wave plasma CVD, Nitrides and Silicon Carbide (DIAMOND 2004), 2004

Effects of iodine doping on optoelectronic properties of diamond-like carbon thin-films deposited by microwave surface wave plasma CVD, 9th International Conference on New Diamond Science and Technology (ICNDST-9), 2004

Microwave Surface-Wave Plasma Chemical Vapor Deposition for Amorphous Carbon Deposition by Camphor, 14th International Photovoltaic Science and Engineering Conference (PVSEC 14), 2004

Coarse and Fine Alignment using Differential Moire Signals, 5th International Symposium on Instrumentation and Control Technology (ISICT’2003), 2003

Precision Alignment of Pulse Stage Using Moire Signals, SICE 2002, 2002

Sb Pile-up at the SiO2/Si Interface during Drive-in Process after Predeposition using SOG Source, 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), 2001

Comparison of Boron Diffusion Profiles in Ultra Thin SOI Structures, 2001 IEEE International SOI Conference, 2001

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