CHUBU UNIVERSITY
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UCHIDA Hideo

Profile

Title Associate Professor
Belong to Dept. of Electrical and Electronic Engineering
Dept. of Electronics and Information Engineering
Electrical and Electronic Engineering (graduate school)
Graduated Nagoya Institute of Technology, Graduate School of Engineering
Degree Dr. of Engineering, Nagoya Institute of Technology
Academic Institutional Membership The Japan Society of Applied Physics, The Institute of Electrical Engineers of Japan, The Institute of Electronics, Information and Communication Engineers, The Laser Society of Japan
Field of Study Semiconductor, Solar Cell, Large Scale Integrated Circuit
Research, Studies Carbon Solar Cell, Solar Airship, Impurity Diffusion in Semiconductor, Electrical and Optical Integrated Circuit, Technology of Large Scale Integrated Circuit Fabrication
Curriculum Specialized Introduction to Electronic Engineering, Electromagnetics, Electric Measurements, Optical Communication

Academic Papers, Critique

Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quarts and flexible plastic substrates by microwave surface wave plasma CVD, Diamond and Related Materials, Vol.14, pp.1084-1088, 2005

Photovoltaic characteristics of postdeposition iodine-doped amorphous carbon films by microwave surface wave plasma chemical vapor deposition, Applied physics letters, Vol.87, 161912, 2005

Effects of deposition gas pressure on the properties of hydrogenated amorphous carbon nitride films grown by surface wave microwave plasma chemical vapor deposition, Diamond and Related Materials, Vol.14, pp.975-982, 2005

Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quartz and flexible plastic substrates by microwave surface wave plasma CVD, Diamond and Related Materials, Vol.14, pp.1084-1088, 2005

The optical properties of nitrogenated amorphous carbon grown by a novel surface wave microwave plasma CVD method, Modern Physics Letters B, Vol.18, p.987, 2004

Effects of iodine doping on optoelectronic properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD, Diamond and Related Materials, Vol. 13, pp.2136-2139, 2004

Application of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator, Japanese Journal of Applied Physics, Vol.42, Part1, No.4A, 2003

Sb Pile-up at Oxide/Si Interface during Drive-in Diffusion after Predeposition Using Doped Oxide Source, Japanese Journal of Applied Physics, Vol.42, Part1, No.3, 2003

Boron Diffusion Profiles in Ultrathin Silicon-on-Insulator Structures and Their Relation to Crystalline Quality, Japanese Journal of Applied Physics, Vol.41, Part1, No.7A, 2002

Surface Concentration Dependence of Diffusion Profile Shape for Phosphorus in Si, Solid State Phenomena, Vols.87-79, 2001

Lectures, Symposium, Presentation

Application if Solar-powered Airship to establish wireless Communication during Natural Disaster, 15th International Photovoltaic Science and Engineering Conference (PVSEC-15), 2005

Effects of Microwave Power on Optical and Structural Properties of a-C Thin Films Deposited by Microwave Surface-Wave Plasma CVD, 15th International Photovoltaic Science and Engineering Conference (PVSEC15), 2005

The Properties of Nitrogenated Amorphous Carbon Films Grown by Microwave-Surface-wave Plasma CVD: Effects of Gas Composition Pressure, 15th International Photovoltaic Science and Engineering Conference (PVSEC15), 2005

Optical and structural properties of amorphous carbon thin films deposited by microwave surface-wave plasma CVD, 8th International Conference on Applications of Diamond and Related Mater,ials/1st Nano Carbon Joint Conference (ADC 2005), 2005

Catalytic effects of ferrocene on optical and structural properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD, 10th International Conference on New Diamond Science and Technology (ICNDST-10), 2005

Amorphous carbon thin film deposition by microwave surface-wave plasma CVD for photovoltaic solar cell, 31st Photovoltaic Specialists Conference and Exhibition, 2005

Carbon-based solar cell: A possible solution for energy and environmental problems, World Conference on Energy for Sustainable Development: Technology Advances and Environmental Issues, 2004

Photoconductivity of amorphous carbon nitride films deposited by microwave surface-wave plasma CVD, International Symposium on Nano Carbons 2004 (ISNC 2004), 2004

Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quartz and flexible plastic substrates by microwave surface wave plasma CVD, Nitrides and Silicon Carbide (DIAMOND 2004), 2004

Effects of iodine doping on optoelectronic properties of diamond-like carbon thin-films deposited by microwave surface wave plasma CVD, 9th International Conference on New Diamond Science and Technology (ICNDST-9), 2004

Microwave Surface-Wave Plasma Chemical Vapor Deposition for Amorphous Carbon Deposition by Camphor, 14th International Photovoltaic Science and Engineering Conference (PVSEC 14), 2004

Coarse and Fine Alignment using Differential Moire Signals, 5th International Symposium on Instrumentation and Control Technology (ISICT’2003), 2003

Precision Alignment of Pulse Stage Using Moire Signals, SICE 2002, 2002

Sb Pile-up at the SiO2/Si Interface during Drive-in Process after Predeposition using SOG Source, 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), 2001

Comparison of Boron Diffusion Profiles in Ultra Thin SOI Structures, 2001 IEEE International SOI Conference, 2001

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